300mm Market LeadershipMultiple Product Lines & Large Installed Base

Mattson Aspen III

• CVD, Dry Strip

• >25 tools in production

• Semiconductor 300, Samsung

CFM OMNITM

• Semiconductor 300 “Top Supplier”

• Multiple tools in production

STEAG RTP and Wet

• >30 AST 3000 systems

• 5 wet systems installed

• 3 single tank systems

• Semiconductor 300 “Top Supplier”

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