SEMICONDUCTOR …orders up 26% Y/Y…continued AFM adoption for 130nm
Advances in Semiconductor technology; increased deployment of .13? feature size, deep etch, CMP and 300mm require increased use of advanced AFM Metrology
Higher fab utilization rates and low yields at .13? , continue to drive AFM technology buys…from in-line AFM users (potential 5 to 7 per fab)
In Q103 we received orders for (7) Automated AFMs including (1) New Dimension X3D for Advanced Photo Lithography application
Veeco completed 1st new X3D AFM acceptance at Sematech, installations proceeding at four major Semiconductor accounts