MICROELECTRONICS
REVIEW
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Jean-Marc
Pandraud
President,
Microelectronics
Divisions
   J. Edward Lary
Corporate
Vice President,
Manufacturing 		   

“We had strong growth in Microelectronics in 2000, thanks to the hard work of so many in the organization. ”

“In manufacturing, the big story in 2000 was our success in ramping up microelectronics production 70 percent to meet customer demand.”
 
 

Applications
Millipore products are used for contamination control of fluids used in manufacturing advanced semiconductor devices. These fluids include gases, chemicals, acids, water, and photoresists. Millipore products are also used to control the flow and pressure of gases used in semiconductor manufacturing.


New Products
_Wafergard® Max are all-Teflon® filters for ultra-high purity gas systems.

_Waferpure® NF3 Purifiers protect wafers and gas delivery systems by removing moisture and corrosive HF.

_GCS405 is a highly accurate and rugged low profile platform scale with 0-5 VDC output.

_SurfaceLine™ Modular Components is a family of 1.125" gas delivery components — mass flow controller, pressure transducer, filter, display and gauge — for the smaller footprint requirements for 300mm wafer processing.

_IntelliGen® 2 Photochemical Dispense System with IMPACT® LHVD Filter and Digital Valve Control for integrated, ultra-high precision photochemical dispense in G-line, I-line and DUV photolithography processes.

_Millipore Optimizer™ Filter Manifold for photochemical developer/DI water applications features the Connectology™ changeout technology that allows the filter to be changed out in less than two minutes.

_QuickChange® 1500 point-of-use filter, a small footprint, pre-wet, non-dewetting filter for wet etch applications.

_SOLARIS™ SLR 01 Filter, a small footprint, point-of-use filter for filtration of copper and fine particle slurries.

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