SIA ROADMAP LEADS TO EUV TECHNOLOGIES

10um

1um

0.1um

1980 1982 1984 1986 1988 1990 1992 1994 1996 1998 2000 2002 2004 2006 2008 2010

Lithography Wavelength

Silicon Feature Size

3.0um

2.0um

1.5um

1.0um

0.6um

0.5um

0.4um

0.25um

0.18um

0.15um

0.13um

0.11um

0.10um

0.436um

0.365um

0.35um

0.248um

0.193um

0.157um

0.013um

Microns

Above Wavelength

Near

Wavelength

SubWavelength

Above Wavelength Again

DUV EUV

Visible Light (Optical) Invisible Light (UV)

0.045um

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