TCZ’s production tool for flat panel display fabrication, the TCZ-900A, is designed to be used in the manufacture of both advanced liquid crystal displays (“LCD”) and next generation OLED displays, which are used in cell phones, laptops and televisions.
Laser crystallization is a key step in the manufacturing process for many types of LCD and OLED displays. A glass plate, coated with a thin film of amorphous silicon, is exposed to a high-power laser that converts the silicon into a poly-crystalline form, which is then used to create the pixel control circuit. The TCZ crystallization system uses a 600W laser with advanced beam shaping optics to form a very narrow line focus that is 730mm long, allowing a generation 4 size glass plate (730mm x 920mm) to be processed in a single pass. This approach produces very uniform crystalline silicon material across the entire glass plate, which is needed to support the high-performance OLED pixel circuits.
TCZ shipped and installed its first laser crystallization system for the OLED flat panel display market at a large Korean display manufacturer in 2009. TCZ is working with this display maker to demonstrate the system's differentiated throughput and the superior uniformity of TCZ’s laser crystallization technology.
